MEMS

Dynamics of MEMS

  1. Alan Zehnder, Richard Rand, Slava Krylov, “Phase Locking of Electrostatically Coupled Thermo-optically Driven MEMS Limit Cycle Oscillators,” International Journal of Nonlinear Mechanics, 102, pp. 92-100 (2018), https://doi.org/10.1016/j.ijnonlinmec.2018.03.009
  2. Nir Dick, Scott Grutzik, Christopher Wallin, B. Robert Ilic, Slava Krylov, Alan Zehnder “Actuation of higher harmonics in large arrays of micromechanical cantilevers for expanded resonant peak separation,” ASME Journal of Vibration and Acoustics, 140, pp. 051013-1 – 011013-10 (2018), doi:10.1115/1.4039568Preprint
  3. David Blocher, Richard Rand and Alan T. Zehnder, “Analysis of laser power threshold for self oscillations in thermo-optically excited doubly supported MEMS beams,” International Journal of Non-Linear Mechanics, 57 (2013), 10-15, doi: 10.1016/j.ijnonlinmec.2013.06.010.
  4. David Blocher, Richard Rand and Alan T. Zehnder, “Multiple limit cycles in laser interferometric transduced resonators,” International Journal of Nonlinear Mechanics, 52 (2013), 119-126, doi: 10.1016/j.ijnonlinmec.2013.02.008
  5. David B. Blocher, Richard H. Rand and Alan T. Zehnder, “Entrainment of Micromechanical Limit Cycle Oscillators in the Presence of Frequency Instability,” IEEE/ASME Journal of Microelectromechanical Systems, 22, (2013), 835-845, 1109/JMEMS.2013.2248124
  6. David Blocher, Alan T. Zehnder, Richard H. Rand and Shreyasi Mukerji, “Anchor deformations drive limit cycle oscillations in interferometrically transduced MEMS beams,” Finite Elements in Analysis and Design, 49, 52-57, (2012), http://dx.doi.org/10.1016/j.finel.2011.08.020.
  7. Manoj Pandey, Robert B. Reichenbach, Alan T. Zehnder, Amit Lal and Harold Craighead, “Reducing anchor loss in MEMS resonators using mesa isolation,” IEEE/ASME Journal of Microelectromechanical Systems, 18, 836-844, (2009) http://dx.doi.org/10.1109/JMEMS.2009.2016271.
  8. Manoj Pandey, Richard Rand and Alan T. Zehnder, “Frequency locking in a forced Mathieu-van der Pol System,” Nonlinear Dynamics, 54, pp. 3-12 (2007), doi:10.1007/s11071-007-9238-x
  9. Tuhin Sahai, Rustom Bhiladvala and Alan T. Zehnder, “Thermomechanical transitions in doubly-clamped micro-oscillators,” International Journal of Non-Linear Mechanics, 42, pp. 596-607, (2007) doi:10.1016/j.ijnonlinmec.2006.12.009.
  10. Manoj Pandey, Richard Rand and Alan Zehnder, “Perturbation Analysis of Entrainment in a Micromechanical Limit Cycle Oscillator,” Communications in Nonlinear Science and Numerical Simulation, 12, pp. 1291-1301, (2007) doi:10.1016/j.cnsns.2006.01.017
  11. Manoj Pandey, Keith Aubin, Maxim Zalalutdinov , Robert Reichenbach , Alan Zehnder, Richard Rand and Harold G. Craighead, “Analysis of Frequency Locking in Optically Driven MEMS Resonators,” IEEE/ASME Journal of Microelectromechanical Systems, 15, pp. 1546-1554, (2006) 10.1109/JMEMS.2006.879693.
  12. Nazaretski, R. D. Merithew, V. O. Kostroun, A. T. Zehnder, R. O. Pohl, and J. M. Parpia, “Effect of low-level radiation on the low temperature acoustic behavior of a-SiO2”, Phys. Rev. Letters, 92, pp. 245502 (2004) doi: 10.1103/PhysRevLett.92.245502.
  13. Keith Aubin, Maxim Zalalutdinov, Tuncay Alan, Robert Reichenbach, Richard Rand, Alan Zehnder, Jeevak Parpia, and Harold Craighead, “Limit cycle oscillations in CW laser driven NEMS,” IEEE/ASME Journal of Microelectromechanical Systems, 13, 1018-1026, (2004) http://dx.doi.org/10.1109/JMEMS.2004.838360.
  14. Maxim Zalalutdinov, Keith L. Aubin, Robert B. Reichenbach, Alan T. Zehnder, Brian Houston, Jeevak M. Parpia, and Harold G. Craighead, “Shell-type Micromechanical Actuator and Resonator,” Applied Physics Letters, 83, pp. 3815-3817, (2003) http://dx.doi.org/10.1063/1.1622792
  15. Maxim Zalalutdinov, Keith Aubin, Manoj Pandey, Alan Zehnder, Richard Rand, Brian Houston, Jeevak Parpia, Harold Craighead, “Frequency entrainment for micromechanical oscillator,” Applied Physics Letters, 83, 3281-3283, (2003), http://dx.doi.org/10.1063/1.1618363.
  16. A. Czaplewski, B. Ilic, M. Zalalutdinov, W.L.Olbricht, A.T. Zehnder, H.G. Craighead, and T.A. Michalske, “A micromechanical flow sensor for microfluidic applications,” IEEE/ASME Journal of Microelectromechanical Systems, 13, pp. 576-585, (2004), http://dx.doi.org/10.1109/JMEMS.2004.832179.

Strength and Fracture

  1. Scott Grutzik, Erik Milosevic, Brad Boyce and Alan Zehnder, “Oxide driven strength evolution of silicon surfaces,” Journal of Applied Physics, 118, 195304 (2015); doi: 10.1063/1.4936118
  2. Scott Grutzik, Richard S. Gates, Yvonne B. Gerbig, Douglas T. Smith, Robert F. Cook, and Alan T. Zehnder, “Accurate Spring Constant Calibration for Stiff AFM Cantilevers,” Review of Scientific Instruments, 84, 113706 (2013); doi: 10.1063/1.4832978 

    Calibration and use of AFM for fracture strength measurement
    Calibration and use of AFM for fracture strength measurement.
  3. Tuncay Alan and Alan T. Zehnder, “A Monte-Carlo simulation of the effect of surface morphology on the fracture of nanobeams,” International Journal of Fracture, 148, pp. 129-138 (2007). LINK
  4. Tuncay Alan, Alan T. Zehnder, Debodhonyaa Sengupta and Melissa A. Hines, “Methyl monolayers improve the fracture strength and durability of silicon nanobeams, ” Applied Physics Letters, 89, 231905, (2006) http://dx.doi.org/10.1063/1.2400180.
  5. Tuncay Alan, Melissa A. Hines and Alan T. Zehnder, “Effect of surface morphology on the fracture strength of silicon nanobeamsApplied Physics Letters, 89, 091901 (2006) http://dx.doi.org/10.1063/1.2338649.