Bhaskar, M. Walth, R. H. Rand and A. T. Zehnder, “Bistability in Coupled Opto-Thermal Micro-Oscillators,” Journal of Microelectromechanical Systems, https://doi.org/10.1109/JMEMS.2022.3169430 . (2022)

In this work we experimentally investigate the dynamics of pairs of opto-thermally driven, mechanically coupled, doubly clamped, silicon micromechanical oscillators, and numerically investigate the dynamics of the corresponding lumped-parameter model. Coupled limit cycle oscillators exhibit striking nonlinear dynamics and bifurcations in response to variations in system parameters.